蝕刻劑/金屬的匹配性表
| Al | Au | Cr | Cu | Ni | Si | Si3N4 | SiO2 | Ti | W | GaAs | Ta/TaN |
鋁A | Etch | Ok | Etch | Etch | Etch | Surf ox | Slight | Ok | Ok | Ok | Etch | Surf ox |
鋁D | Etch | Ok | Slight | Ok | Ok | Ok | Slight | Ok | Ok | Ok | Ok | Ok |
鉻蝕刻劑1020 | Etch | Ok | Etch | Etch | Etch | Surf ox | Ok | Ok | Ok | Ok | Etch | Surf ox |
鉻蝕刻劑1020 CRE-473 | Etch | Ok | Etch | Ok | Slight | Ok | Ok | Ok | Etch | Ok | Etch | Ok |
鉻蝕刻劑TFD | Etch | Ok | Etch | Etch | Etch | Surf ox | Ok | Ok | Ok | Ok | Etch | Surf ox |
銅蝕刻劑100 | Etch | Ok | Slight | Etch | Etch | Ok | Ok | Ok | Slight | Ok | Etch | Ok |
銅蝕刻劑200 | Etch | Ok | Slight | Etch | Etch | Ok | Ok | Ok | Slight | Ok | Etch | Ok |
銅蝕刻劑APS-100 | Ok | Ok | Ok | Etch | Slight | Ok | Ok | Ok | Ok | Ok | | Ok |
GE-8110 | Etch | Etch | Ok | Corrode | Ok | Ok | Ok | Ok | Ok | Ok | Etch | Ok |
GE-8111 | Etch | Etch | Ok | Corrode | Ok | Ok | Slight | Ok | Ok | Ok | Etch | Ok |
GE-8148 | Etch | Etch | Ok | Corrode | Ok | Ok | Ok | Ok | Ok | Ok | Etch | Ok |
金蝕刻劑TFA | Etch | Etch | Ok | Corrode | Slight | Ok | Ok | Ok | Ok | Ok | Etch | Ok |
鎳鉻蝕刻劑TFC | Etch | Ok | Etch | Etch | Etch | Surf ox | Ok | Ok | Ok | Ok | Etch | Surf ox |
鎳鉻蝕刻劑TFN | Etch | Ok | Etch | Etch | Etch | Surf ox | Ok | Ok | Ok | Ok | Etch | Surf ox |
鎳蝕刻劑TFB | Etch | Ok | Etch | Etch | Etch | Surf ox | Ok | Ok | Ok | Ok | Etch | Surf ox |
鎳蝕刻劑TFG | Etch | Ok | Ok | Ok | Etch | Ok | Ok | Ok | Ok | Ok | Ok | Ok |
鎳刻劑1型 | Etch | Ok | Slight | Etch | Etch | Ok | Ok | Ok | Slight | Ok | Etch | Ok |
銀蝕刻劑TFS | Etch | Etch | Ok | Corrode | Slight | Ok | Ok | Ok | Ok | Ok | Etch | Ok |
氮化鉭蝕刻劑Ⅲ | Etch | Ok | Etch | Etch | Etch | Etch | Ok | Etch | Etch | Ok | Etch | Etch |
氮化鉭蝕刻劑SIE-8607 | Etch | Ok | Etch | Etch | Etch | Etch | Ok | Etch | Etch | Ok | Etch | Etch |
鈦蝕刻劑TFT | Etch | Ok | Etch | Ok | Ok | Ok | Etch | Etch | Etch | Ok | Etch | Ok |
鈦蝕刻劑TFTN | Etch | Ok | Etch | Slight | Slight | Ok | Ok | Ok | Etch | Ok | Etch | Ok |
鈦-鎢TIW-30 | Ok | Ok | Ok | Ok | Slight | Ok | Ok | Ok | Ok | Ok | | Ok |
鎢蝕刻劑TFW | Etch | Etch | Etch | Ok | Etch | Slight | Ok | Slight | Ok | Etch | Etch | Ok |
注：Etch=顯著蝕刻；Slight=輕微侵蝕；Ok=不侵蝕；Surf ox=表面氧化；Corrode=表面腐蝕
